Elite 300 Station Platform

EPD - Elite 300 - ProductThe Next Step in 300mm Probing

The Elite 300 sets the new standard in 300mm probing. In step with the ITRS roadmap at 45nm and below, the Elite 300 overcomes measurement challenges brought on by increased device complexity, smaller pad sizes, and lower voltages. The Elite 300 delivers unprecedented stepping accuracy and wafer planarity over the full temperature range. It also provides the world's lowest-noise "Quiet" environment, and ensures low-leakage, low-capacitance measurements.

Elite 300: The Next Step in 300mm Probing
EPD Elite 300 Product BrochureEPD - Elite 300 - Dry Demo
Product BrochureSystem Highlights
 EPD - Elite 300 - Datasheet EPD Elite 300 Accessory Catalog
 Datasheet  Accessory Catalog

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Problems Solved: Accurate Measurements in Complex Environments
ChallengeAdvanced StageThermal SystemPureline/ MicroChamberRigid ArchitectureAutomation
Small-Pad ProbingLayout - Blue DotLayout - Blue Dot Layout - Blue Dot Layout - Blue Dot
Thermal Measurements Layout - Blue DotLayout - Blue Dot Layout - Blue Dot
Low-Noise MeasurementsLayout - Blue DotLayout - Blue DotLayout - Blue Dot  
Multi-Site Testing Layout - Blue Dot Layout - Blue DotLayout - Blue Dot
Internal-Node Probing   Layout - Blue DotLayout - Blue Dot

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Which Station is Right for My Application?
ApplicationElite 300/APElite 300/MElite 300/S
ParametricGm,VthLayout - Blue DotLayout - Lt Blue Dot 
Ig, Id offLayout - Blue DotLayout - Lt Blue Dot 
Cox, C-VLayout - Blue DotLayout - Lt Blue Dot 
1/fLayout - Blue Dot  
RFGain, Power Layout - Lt Blue DotLayout - Blue Dot
NF, NPLayout - Blue DotLayout - Lt Blue Dot 
mmWLayout - Blue DotLayout - Lt Blue Dot 
multi-port Layout - Lt Blue DotLayout - Blue Dot
WLREMLayout - Lt Blue DotLayout - Blue Dot 
TDDBLayout - Lt Blue DotLayout - Blue Dot 
NBTILayout - Lt Blue DotLayout - Blue Dot 
HCILayout - Lt Blue DotLayout - Blue Dot 
FA/DDInternal node  Layout - Blue DotLayout - Lt Blue Dot
EM Layout - Blue DotLayout - Lt Blue Dot
Laser Layout - Blue DotLayout - Lt Blue Dot
Sub-micron Layout - Blue DotLayout - Lt Blue Dot

Layout - Blue Dot = Recommended Layout - Lt Blue Dot = Compatible

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